"We Are The No. 1 Source for Sales, Parts and Service for GCA Stepper and SSI Wafertrack Systems."

- Call 512-971-1531 For Prompt Service -


Please call us with inquiries on specific parts for all of your GCA stepper and photolithography wafer fabrication equipment needs at (512) 971-1531. You may also email us at: ssiparts@austin.rr.com

Semiconductor Equipment

We stock a wide array of parts, including a large assortment for GCA steppers and SSI wafertracks. Many of our parts are configured, tested, and warrantied to ensure your needs are met.

GCA Steppers

Contact us for help in identifying your parts needs. GCA stepper models supported include: 4800, 6300, 8000, 8500, ALS, AutoStep & XLS.

SSI Wafertracks

Contact us for help in identifying your parts needs. All SSI wafertrack models are supported including: System 1A, System 150/500, Scorpio, and OrbiTrak wafer coat and develop systems.


Please have a look thru our listing of GCA Steppers and Components.  All units are available for immediate delivery and setup. There is a link provided to access a printable Data Sheet at the bottom of each item description. If you have further questions, please call us at (512) 971-1531 for prompt service.


 – Available Units –


GCA AutoStep – 1835

GCA AutoStep – 1815

GCA Model ALS – 1710


About Stepper Care Services

 Front of Stepper Care Servics Office

We provide parts and service for GCA steppers, and have been committed to a superior level of customer satisfaction since 2002. With over 35 years of experience, our service team provides expedient solutions to current GCA stepper owners. Our extensive knowledge of all models of GCA steppers enables us to provide support and refurbishing to a wide variety of valued customers throughout the world.

SCS is an active part of the technical community of greater Austin, Texas. Our corporate facility houses a lithography cleanroom featuring a variety of functional GCA steppers. We currently offer a number of options, including models 8500, ALS, AutoStep200 and XLS steppers.

In October 2004, Stepper Care Services, Inc. completed the acquisition of Semiconductor Systems, Inc. (SSI) from FSI International. The SSI wafertrack product line includes: System 1A, System 150/500, SCORPIO, and OrbiTrak wafer coat and develop systems. SCS stands committed to provide quality parts, refurbishing, and technical support for current owners of these SSI wafertrack systems.